With AFSEM® the gradual increase of conductivity can be studied directly between the irradiation steps, without sample transfer. Since the measurements are performed in the vacuum of the SEM, contamination issues that are generally encountered in air are reduced.
For such measurements the AFSEM® works with conductive, self-sensing cantilevers with sharp, solid platinum tips. The platinum tips are grown by focused electron beam induced deposition. A gold lead connects the tip to a current amplifier.